IEEE ISCASで発表しました。
Takuichi Hirano, et al, “Loss Reduction of Silicon Substrate by Helium-3 or Proton Ion Irradiation for a Millimeter-Wave CMOS Chip,” Proc. of European Advanced Material Congress (EAMC), pp.83-84, Stockholm, Sweden, August 20-23, 2018. (invited)
Hirano Lab 